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Ciclo de Seminarios 2006

2006 9 MAY

Martes 9 de Mayo
15:00 hs. - Aula de Nivel "0"
Edificio TANDAR
"Basic and applicative aspects of metalorganic vapour deposition (MOCVD)"
Dr. Claudio Pelosi
Consiglio Nazionale delle Ricerche - Istituto dei Materiali per lElettronica ed il Magnetismo, Parma, Italia
RESUMEN: The metalorganic chemical vapour deposition (MOCVD) process for electronic and photonic compound semiconductor materials and devices is reviewed. We consider the basic MOCVD chemical reaction process, growth mechanisms, including hydrodynamics, boundary-layer issues, thermal effects, and pyrolysis reactions. Finally criteria for growth regimes, growth rate, and alloy composition are described. Few examples of material characterization from the structural and doping behaviour are presented.
Contacto
Av. Gral Paz y Constituyentes, San Martín, Pcia. de Buenos Aires, Argentina
Tel: (54-11) 6772-7007 - Fax: (54-11) 6772-7121