Ciclo de Seminarios 2006
2006 9 MAY
Martes 9 de Mayo
15:00 hs. - Aula de Nivel "0"
Edificio TANDAR
"Basic and applicative aspects of metalorganic vapour deposition (MOCVD)"
Dr. Claudio Pelosi
Consiglio Nazionale delle Ricerche - Istituto dei Materiali per lElettronica ed il Magnetismo, Parma, Italia
RESUMEN:
The metalorganic chemical vapour deposition (MOCVD) process for electronic and photonic compound
semiconductor materials and devices is reviewed. We consider the basic MOCVD chemical reaction
process, growth mechanisms, including hydrodynamics, boundary-layer issues, thermal effects, and
pyrolysis reactions. Finally criteria for growth regimes, growth rate, and alloy composition are
described. Few examples of material characterization from the structural and doping behaviour are
presented.